1.

Conference Proceedings
Conference Proceedings
1. Microscale effects of silicon-on-glass micromechanical devices: experimental results and 3D finite element modeling
Borovkov,A.I. ; Pyatishev,E.N. ; Lurie,M.S. ; Pereyaslavets,E.V. ; Lunev,V.P. ; Kazakin,A.N. ; Popova,I.V. ; Lestiev,A.M.
Pub. info.: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering.  pp.361-368,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4348
2.

Conference Proceedings
Conference Proceedings
2. Some aspect of MEMS technology
Pyatishev,E.N. ; Lurie,M.S. ; Popova,I.V.
Pub. info.: Fourth all-russian seminar on problems of theoretical and applied electron optics : 21-22 October 1999, Moscow, Russia.  pp.66-69,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4187