1.

Conference Proceedings
Conference Proceedings
1. Stress and deformation of PZT thin film on silicon wafer due to thermal expansion
Zang, M. ; Polla, D. L. ; Zurn, S. M. ; Cui, T.
Pub. info.: Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A..  pp.107-,  1999.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 574
2.

Conference Proceedings
Conference Proceedings
2. CHARACTERIZATION OF SOL-GEL DERIVED (Pb,Ba)(Zr,Ti,Nb)O3 THIN FILMS FOR OPTICAL WAVEGUIDE DEVELOPMENT
Baude, P. F. ; Wright, J. S. ; Ye, C. ; Francis, L. F. ; Polla, D. L.
Pub. info.: Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.445-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 343
3.

Conference Proceedings
Conference Proceedings
3. CHEMICALLY ASSISTED ION-BEAM ETCHING OF SOL-GEL DERIVED PZT, PLZT AND LiTaO3 THIN FILMS FOR SILICON BASED DEVICE INTEGRATION
Baude, P. F. ; Ye, C. ; Polla, D. L.
Pub. info.: Ferroelectric thin films III : symposium held April 13-16, 1993, San Francisco, California, U.S.A..  pp.139-,  1992.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 310
4.

Conference Proceedings
Conference Proceedings
4. Fabrication Processes and Characteristics of Microelectromechanical System Using PZT Films
Yoon, Y. S. ; Kim, J. H. ; Lim, T. H. ; Bonne, U. A. ; Schimidt, A. M. ; Polla, D. L.
Pub. info.: Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A..  pp.143-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 444
5.

Conference Proceedings
Conference Proceedings
5. Charge Trapping and Degradation Properties of PZT Thin Films for MEMS
Kim, Hyeon-Seag ; Polla, D. L. ; Campbell, S. A.
Pub. info.: Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A..  pp.161-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 444
6.

Conference Proceedings
Conference Proceedings
6. CHARACTERIZATION OF MEMS ACTUATORS VIA NANOINDENTATION
Glumac, D. E. ; Rizq, R. N. ; Robbins, W. P. ; Polla, D. L. ; Nelson, J. C.
Pub. info.: Electronic packaging materials science VII : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.419-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 323