1.

Conference Proceedings
Conference Proceedings
1. Quantitative Evaluation of Iron at the Silicon Surface after Wet Cleaning Treatments
Caputo, D. ; Bacciaglia, P. ; Carpanese, C. ; Polignano, M.L. ; Lazzeri, P. ; Bersani, M. ; Vanzetti, L. ; Pianetta, P. ; Moro, L.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.493-504,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5133
2.

Conference Proceedings
Conference Proceedings
2. Influence of Cobalt Contamination in the Measurement of Diffusion Length of p-type CZ Silicon Wafers
Pic, N. ; Polignano, M.L. ; Caputo, D. ; Salva, G. ; Sardo, M. ; Danel, A.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.505-515,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5133
3.

Conference Proceedings
Conference Proceedings
3. Detection of metal segregation at the oxide-silicon interface
Polignano, M.L. ; Giussani, A. ; Caputo, D. ; Clementi, C. ; Pavia, G. ; Priolo, F.
Pub. info.: Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany.  pp.223-232,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-29
4.

Conference Proceedings
Conference Proceedings
4. Analysis And Suppression Of Process-Induced Defects In Memory Devices
Aununziata, Roberto ; Bottini, Roberta Rita ; Colpani, Paolo ; Cremonesi, Carlo ; Ghidini, Gabriella ; Gomiero, Enrico ; Pavia, Giuseppe ; Pio, Federico ; Polignano, M.L. ; Servalli, Giorgio ; Higgs, Vic
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B3.10-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
5.

Conference Proceedings
Conference Proceedings
5. Defect Generation and Suppression in Device Processes Using a Shallow Trench Isolation Scheme
Peschiarolli, D. ; Brambilla, M. ; Carnevale, G.P. ; Cascella, A. ; Cazzaniga, F ; Clementi, c. ; Cremonesi, C. ; Gilardini, A. ; Martinelli, M. ; Maurelli, A ; Mica, I. ; Pavan, A. ; Pavia, G. ; Piazza, F. ; Polignano, M.L. ; Soncini, V. ; Bonera, E.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.477-488,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-6
6.

Conference Proceedings
Conference Proceedings
6. Detection of Metal Contamination in Intemally Gettered Wafers
Polignano, M.L. ; Bacciaglia, P. ; Caputo, D. ; Clementi, C. ; Padovani, B. ; Priolo, F. ; Simpson, T.
Pub. info.: High purity silicon VII : proceedings of the international symposium.  pp.206-217,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-20
7.

Conference Proceedings
Conference Proceedings
7. Influence of Cobalt Contamination in the Measurement of Diffusion Length of p-type CZ Silicon Wafers
Pic, N. ; Polignano, M.L. ; Caputo, D. ; Salva, G. ; Sardo, M. ; Danel, A.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.505-515,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-3
8.

Conference Proceedings
Conference Proceedings
8. Quantitative Evaluation of Iron at the Silicon Surface after Wet Cleaning Treatments
Caputo, D. ; Bacciaglia, P. ; Carpanese, C. ; Polignano, M.L. ; Lazzeri, P. ; Bersani, M ; Vanzetti, L. ; Pianetta, P. ; Moro, L.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.493-504,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-3