1.

Conference Proceedings
Conference Proceedings
1. Pressure Sensor for Harsh Environments Realised by Triple Stack Fusion Bonding
Visser, M.M. ; Plaza, J.A. ; Wang, D.T. ; Moe, S.T. ; Schjolberg-Henriksen, K. ; Hanneborg, A.B.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.362-367,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-35
2.

Conference Proceedings
Conference Proceedings
2. Semiconductor gas sensor compatibility with CMOS technologies
Lopez-Bosque, M.J. ; Plaza, J.A. ; Santander, J. ; Gracia, I. ; Cane, C. ; Wollenstein, J. ; Moretton, E. ; Lambrecht, A. ; Schjolberg-Henriksen, K.
Pub. info.: Smart Sensors, Actuators, and MEMS.  2  pp.790-801,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116
3.

Conference Proceedings
Conference Proceedings
3. Characterization of optical accelerometers based on SU-8 [5956-33]
Liobera, A. ; Seidemann, V. ; Plaza, J.A. ; Cadarso, V.J. ; Buttgenbach, S.
Pub. info.: Integrated Optics: Theory and Applications.  pp.59560W-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5956