1.

Conference Proceedings
Conference Proceedings
1. Fabrication and Characterization of Spin-On Silica Xerogel Films
Nitta, S. ; Jain, A. ; Pisupatti, V. ; Gill, W. N. ; Wayner, P. C., Jr. ; Plawsky, J. L.
Pub. info.: Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A..  pp.99-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 511
2.

Conference Proceedings
Conference Proceedings
2. Ion Beam Techniques for Low-K Materials Characterization
Bakhru, H. ; Kumar, A. ; Kaplan, T. ; Delarosa, M. ; Fortin, J. ; Yang, G.-R. ; Lu, T.-M. ; Kim, S. ; Steinbruchel, C. ; Tang, X. ; Moore, J. A. ; Wang, B. ; McDonald, J. ; Nitta, S. ; Pisupatti, V. ; Jain, A. ; Wayner, P. ; Plawsky, J. ; Gill, W. ; Jin, C.
Pub. info.: Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A..  pp.125-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 511