1.

Conference Proceedings
Conference Proceedings
1. The Effect of Carbon/Self-Interstitial Clusters on Carbon Diffusion in Silicon Modeled by Kinetic Monte Carlo Simulations
Pinacho, Ruth ; Jaraiz, Martin ; Gossmann, Hans J. ; Gilmer, George H. ; Benton, Janet L. ; Werner, P.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B7.2-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
2.

Conference Proceedings
Conference Proceedings
2. Effects Of Nonmelt Excimer Laser Annealing On 5keV Boron Implanted in Silicon
Jaraiz, Martin ; Castrillo, Pedro ; Pinacho, Ruth ; Pelaz, Lourdes ; Barbolla, Juan ; Gilmer, George H. ; Rafferty, Conor S.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B10.5-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610