1.

Conference Proceedings
Conference Proceedings
1. Overlay-performance on tungsten CMP layers using the ATHENA alignment system
Rivera,G. ; Rozzoni,L. ; Castellana,E. ; Miraglia,G. ; Lam,P.L. ; Plauth,J. ; Dunbar,A. ; Phillips,M.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.428-440,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
2.

Conference Proceedings
Conference Proceedings
2. Video segmentation techniques for news
Phillips,M. ; Wolf,W.
Pub. info.: Multimedia storage and archiving systems : 18-19 November 1996, Boston, massachusetts.  pp.243-251,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2916
3.

Conference Proceedings
Conference Proceedings
3. W-CMP alignment using ASML's ATHENA system on an I-line stepper
Prasad,K.J. ; Rajan,D.A. ; Tan,Y.K. ; Sun,G.P. ; Morgan,S. ; Phillips,M. ; Ng,B.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.79-88,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344