1.
Conference Proceedings |
1. SILICON NITRIDE DEPOSITED AT VERY LOW SILANE PRESSURES USING ELECTRON CYCLOTRON RESONANCE PLASMAS
Flemish, J.R. ; Pfeffer, R. ; Buchwald, W. ; Jones, K.A.
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2.
Conference Proceedings |
Horng, S. ; Hirose, Y. ; Kahn, A. ; Wrenn, C. ; Pfeffer, R.
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3.
Technical Paper |
Yu, Q. ; Zhu, C. ; Pfeffer, R. ; Dave, R. N.
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