1.

Conference Proceedings
Conference Proceedings
1. THE EFFECT OF THIN DIELECTRIC FILMS ON THE ACCURACY OF PYROMETRIC TEMPERATURE MEASUREMENT
Pettibone, D.W. ; Suarez, J.R. ; Gat, A.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.209-216,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
2.

Conference Proceedings
Conference Proceedings
2. Impact of EUV mask quality on optical inspection sensitivity
Pettibone, D.W. ; Dayal, A. ; Stokowski, S.E.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.400-407,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
3.

Conference Proceedings
Conference Proceedings
3. Integration of antireflection coatings on EUV absorber stacks
Wasson, J.R. ; Han, S.-I. ; Edwards, N.V. ; Weisbrod, E. ; Dauksher, W.J. ; Mangat, P.J.S. ; Pettibone, D.W.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.382-388,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
4.

Conference Proceedings
Conference Proceedings
4. Inspection of EUV reticles
Pettibone, D.W. ; Veldman, A. ; Liang, T. ; Stivers, A.R. ; Mangat, P.J. ; Lu, B. ; Hector, S.D. ; Wasson, J.R. ; Bleadel, K.L. ; Fisch, E. ; Walker, D.M.
Pub. info.: Emerging Lithographic Technologies VI.  Part One  pp.363-374,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688