1.

Conference Proceedings
Conference Proceedings
1. Reticle OPC defect printability and detectability for 180-nm technology
Rudzinski, M. W. ; Zurbrick, L. S. ; Pettibone, D. W. ; Ananth, M.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.535-545,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
2.

Conference Proceedings
Conference Proceedings
2. Inspection and repair issues for Step-and-Flash Imprint Lithography templates
Nordquist, K. J. ; Dauksher, W. J. ; Mancini, D. P. ; Resnick, D. J. ; Hess, H. F. ; Pettibone, D. W. ; Adler, D. ; Bertsche, K. ; White, R. ; Csuy, J. E. ; Lee, D.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.853-863,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
3.

Conference Proceedings
Conference Proceedings
3. Optical inspection of NGL masks
Pettibone, D. W. ; Stokowski, S. E.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.807-815,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
4.

Conference Proceedings
Conference Proceedings
4. Defect printability and inspection of EUVL mask
Lu, B. ; Wasson, J. R. ; Mangat, P. J. S. ; Cobb, J. L. ; Hector, S. D. ; Pettibone, D. W. ; O'Connell, D.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.1425-1434,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567