1.

Conference Proceedings
Conference Proceedings
1. Low Energy Ion Irradiation of Silicon: Compound Formation and Segregation of Impurities
Petravic, M. ; Williams, J.S. ; Deenapanray, P.N.K.
Pub. info.: Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium.  pp.147-155,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-7
2.

Conference Proceedings
Conference Proceedings
2. Inteactions of Point Defects and Impurities With Open Volume Defects in Silicon
Williams, J.S. ; Ridgway, M.C. ; Conway, M.J. ; Wong-Leung, j. ; Williams, B.C. ; Petravic, M. ; Fortuna, F. ; Ruault, M.-O. ; Bernas, H.
Pub. info.: Ion beam synthesis and processing of advanced materials : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 647
3.

Conference Proceedings
Conference Proceedings
3. MICROSTRUCTURE OF IRRADIATED SILICON
Williams, J. S. ; Wong-Leung, J. ; Goldberg, R. D. ; Petravic, M.
Pub. info.: Microstructure of irradiated materials : Symposium held November 29-1 December, 1994, Boston, Massachusetts USA.  pp.543-,  1995.  Pittsburgh, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 373
4.

Conference Proceedings
Conference Proceedings
4. Characterization of Low-Temperature PECVD Silicon Dioxide Films
Deenapanray, P. N. K. ; Lengyel, J. ; Tan, H. H. ; Petravic, M. ; Durandet, A. ; Williams, J. S. ; Jagadish, C.
Pub. info.: Properties and processing of vapor-deposited coatings : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A..  pp.197-,  1999.  Warrendale, PA..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 555
5.

Conference Proceedings
Conference Proceedings
5. Radiation-Induced Segregation of Metals at Moving SiO2-Amorphous Si Interfaces
Williams, J. S. ; Petravic, M. ; Conway, M. ; Short, K. T.
Pub. info.: Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.575-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 439
6.

Conference Proceedings
Conference Proceedings
6. Oxide and Nitride Formation and Segregation of Metals During Oxygen and Nitrogen Bombardment of Silicon
Williams, J. S. ; Petravic, M. ; Conway, M. ; Fu, L. ; Chivers, D. J.
Pub. info.: Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A..  pp.153-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 504
7.

Conference Proceedings
Conference Proceedings
7. The Influence of Cavities and Point Defects on Cu Gettering and B Diffusion in Si
Wong-Leung, J. ; Williams, J. S. ; Petravic, M.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.457-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469