1.

Conference Proceedings

Conference Proceedings
Kizilyalli,I.C. ; Huang,R.Y. ; Hwang,D. ; Kane,B.C. ; Ashton,R. ; Kuehne,S. ; Deng,X. ; Twiford,M.S. ; Martin,E.P. ; Shuttleworth,O. ; Wittingham,K. ; Lytle,S. ; Ma,Y. ; Roy,P.K. ; Olmer,L. ; Vaidya,H. ; Li,F. ; Li,X. ; Persson,E. ; Massengale,A.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.175-181,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506
2.

Conference Proceedings

Conference Proceedings
Jastrzebski,L. ; Edelman,P. ; Lagowski,J.J. ; Hoff,A.M. ; Savchouk,A. ; Persson,E.
Pub. info.: Optical characterization techniques for high-performance microelectronic device manufacturing III.  pp.207-217,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2877
3.

Conference Proceedings

Conference Proceedings
Stevie,F.A. ; Persson,E. ; DeBusk,D.K. ; Savchuk,A. ; Hoff,A.M. ; Edelman,P. ; Lagowski,J.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.357-364,  1997.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3322