Gupta, V. ; Theodoropoulos, C. ; Peck, J. D. ; Mountziaris, T. J.
Pub. info.:
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.161-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Sarigiannis, D. ; Peck, J. D. ; Mountziaris, T. J. ; Kioseoglou, G. ; Petrou, A.
Pub. info.:
New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.41-, 2000. Warrendale, PA. MRS-Materials Research Society