Paul Timans ; Jeff Gelpey ; Steve McCoy ; Wilfried Lerch ; Silke Paul
Pub. info.:
Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.. pp.3-14, 2006. Warrendale, Pa.. Materials Research Society
Paul Timans ; Yao Zhi Hu ; Jeff Gelpey ; Steve McCoy ; Wilfried Lerch ; Silke Paul ; Detlef Bolze ; Hamid Kheyrandish
Pub. info.:
Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.. pp.155-162, 2008. Warrendale, Pa.. Materials Research Society