1.

Conference Proceedings

Conference Proceedings
Patrick, H. J. ; Vohra, S. T.
Pub. info.: OFS-13 : 13th International Conference on Optical Fiber Sensors & Workshop on Device and System Technology toward Future Optical Fiber Communication and Sensing : April 12-16, 1999, Kyongju Hyundai Hotel, Kyongju, Korea.  pp.561-564,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3746
2.

Conference Proceedings

Conference Proceedings
Patrick, H. J. ; Attota, R. ; Barnes, B. M. ; Germer, T. A. ; Stocker, M. T. ; Silver, R. M. ; Bishop, M. R.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520J-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
3.

Conference Proceedings

Conference Proceedings
Silver, R. M. ; Barnes, B. M. ; Attota, R. ; Jun, J. ; Filliben, J. ; Soto, J. ; Stocker, M. ; Lipscomb, P. ; Marx, E. ; Patrick, H. J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520Z-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152