1.

Conference Proceedings
Conference Proceedings
1. Kinetics of the C49 to C54 Phase Transformation in TiSi2 Thin Films on Deep-Sub-Micron Lines
Kittl, J. A. ; Prinslow, D. A. ; Apte, P. P. ; Pas, M. F.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.269-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
2.

Conference Proceedings
Conference Proceedings
2. Understanding the Impact of Batch versus Single Wafer in Thermal Processing Using Cost of Ownership Analysis
Hossain-Pas, S. ; Pas, M. F.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.201-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
3.

Conference Proceedings
Conference Proceedings
3. Rapid Thermal Processing: When Will It Replace Batch Processing?
Pas, M. F. ; Pas, S. D.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.147-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
4.

Conference Proceedings
Conference Proceedings
4. Optimization of Ti and Co Self-Aligned Silicide RTP for 0.10ｦﾌm CMOS
Kittl, J. A. ; Hong, Q. Z. ; Yang, H. ; Yu, N. ; Rodder, M. ; Apte, P. P. ; Shiau, W. T. ; Chao, C. P. ; Breedijk, T. ; Pas, M. F.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.331-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
5.

Conference Proceedings
Conference Proceedings
5. Optimization of Ti and Co Self-Aligned Silicide RTP for 0.10 ｦﾌm CMOS
Kittl, J. A. ; Hong, Q. Z. ; Yang, H. ; Yu, N. ; Rodder, M. ; Apte, P. P. ; Shiau, W. T. ; Chao, C. P. ; Breedijk, T. ; Pas, M. F.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.255-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
6.

Conference Proceedings
Conference Proceedings
6. Modeling of Device Characteristics as Function of Ti Salicide Rapid Thermal Processing Parameters for Deep-Sub-Micron CMOS Technologies
Kittl, J. A. ; Prinslow, D. A. ; Misium, G. ; Pas, M. F.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.175-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429