1.

Conference Proceedings
Conference Proceedings
1. 6 kHz MOPA light source for 193 nm immersion lithography
Gillespie, W. D. ; Ishihara, T. ; Partlo, W. N. ; Ferguson, G. X. ; Simon, M. R.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1293-1303,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. EUV focus sensor: design and modeling
Hoffman, J. R. ; Bykanov, A. N. ; Khodykin, O. V. ; Ershov, A. I. ; Bowering, N. R. ; Fomenkov, I. V. ; Partlo, W. N. ; Myers, D. W.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.312-319,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751
3.

Conference Proceedings
Conference Proceedings
3. Zone-plate-array lithography (ZPAL): optical maskless lithography for cost-effective patterning
Rettig, C. L. ; Khodykin, O. V. ; Hoffman, J. R. ; Marx, W. F. ; Bowering, N. R. ; Vargas, E. ; Ershov, A. I. ; Fomenkov, I. V. ; Partlo, W. N.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.330-339,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751
4.

Conference Proceedings
Conference Proceedings
4. Characterization of flare on Intel's EUV MET
Fleurov, V. B. ; Oh, P. C. ; Steiger, T. D. ; Fomenkov, I. V. ; Partlo, W. N.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.293-300,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751
5.

Conference Proceedings
Conference Proceedings
5. High-power low cost drive laser for LPP source [6151-137]
Fomenkov, I V. ; Hanssaon, B. A. M. ; Boering, N. R. ; Ershov, A. I. ; Partlo, W. N. ; Fleurov, V. B. ; Khodykin, O. V. ; Bykanov, A. N. ; Rettig, C. L. ; Hoffman,J.R. ; Vargas, E. ; Chavez,L,J.A. ; Marx,W.F. ; Brant, D. C.
Pub. info.: Emerging Lithographic Technologies X.  pp.61513X-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151