Dou, K. ; Irwin, B. ; Parkhill, R.L. ; Knobbe, E.T.
Pub. info.:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.492-496, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micromachining Technology for Micro-Optics and Nano-Optics. pp.156-163, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering