1.

Conference Proceedings

Conference Proceedings
Park,Y.-K. ; Ju,B.-K. ; Park,H.-W. ; Yoon,Y.-S. ; Yom,S.-S. ; Oh,Y.-J. ; Park,J.-H. ; Suh,S.-H. ; Oh,M.-H. ; Kim,C.-J.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.356-363,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892
2.

Conference Proceedings

Conference Proceedings
Park,C.-H. ; Rhie,S.-U. ; Choi,J.-H. ; Park,J.-S. ; Seo,H.-W. ; Kim,Y.-H. ; Park,Y.-K. ; Han,W.-S. ; Lee,W.-S. ; Kong,J.-T.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1041-1046,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
3.

Conference Proceedings

Conference Proceedings
Park,Y.-K. ; Choi,S.-B.
Pub. info.: Smart structures and materials 1997 : smart structures and integrated systems : 3-6 March 1997, San Diego, California.  pp.528-535,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3041