Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.319-328, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Kim, K. ; Park, J.-Y. ; Kang, H.-K. ; Park, J. ; Moon, S.
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Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.388-395, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Pak, J.J. ; Kim, J. ; Oh, S.W. ; Son, J.H. ; Cho, S.H. ; Lee, S.-K. ; Park, J.-Y. ; Kim, B.
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Smart structures and materials 2004 : electroactive polymer actuators and devices (EAPAD) : 15-18 March 2004, San Diego, California, USA. pp.272-280, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering