Park, E.S. ; Lee, J.H, ; Park, D.I. ; Jeong, W.-G. ; Seo, S.K. ; Kim, S.-S. ; Choi, S.-S. ; Jeong, S.-H.
Pub. info.:
22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.792-799, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering