1.
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Conference Proceedings
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Kim, M.-J. ; Lee, D.-H. ; Ko, D.-H. ; Ku, J.-H. ; Choi, S. ; Fujihara, K. ; Kang, H.-K. ; Oh, S-H. ; Park, C.-G. ; Lee, H.-J.
Pub. info.: |
ULSI Process Integration : proceedings of the International Symposium. pp.571-580, 2001. Pennington, N.J.. Electrochemical Society |
Title of ser.: |
Electrochemical Society Proceedings Series |
Ser. no.: |
2001-2 |
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2.
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Conference Proceedings
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Lee, I.-H. ; Lee, J.-S. ; Lee, K.-Y. ; Park, C.-G. ; Choi, J.-S. ; Lee, J.
Pub. info.: |
Advances in Resist Technology and Processing XX. 2 pp.1444-1452, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
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