1.

Conference Proceedings

Conference Proceedings
Kim, M.-J. ; Lee, D.-H. ; Ko, D.-H. ; Ku, J.-H. ; Choi, S. ; Fujihara, K. ; Kang, H.-K. ; Oh, S-H. ; Park, C.-G. ; Lee, H.-J.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.571-580,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
2.

Conference Proceedings

Conference Proceedings
Lee, I.-H. ; Lee, J.-S. ; Lee, K.-Y. ; Park, C.-G. ; Choi, J.-S. ; Lee, J.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1444-1452,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039