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Kato, N. ; Park, C. S. ; Matsumoto, T. ; Kikuta, H. ; Iwata, K.
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Lithographic and micromachining techniques for optical component fabrication II : 3-4 August 2003, San Diego, California, USA. pp.71-78, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life. Part One pp.304-311, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering