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11 results

Conference Proceedings

1. THE PROPERTIES OF A PLASMA DEPOSITED CANDIATE INSULATOR FOR FUTURE MULTILEVEL INTECONNECTS TECHNOLOGY

Gelatos, A. V. ; Mogab, C. J. ; Saha, N. C. ; Parikh, N.

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.347-354, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

2. HIGH PURITY TITANIUM SILICIDE FILMS FORMED BY SPUTTER DEPOSITION AND RAPID THERMAL ANNEALING

Brat, T. ; Wei, J. C. S. ; Poole, J. ; Hodul, D. ; Parikh, N. ; Wickersham Jr., C.

Pub. info.:	Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.191-198, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	92

Conference Proceedings

3. Formation of a Buried Soft Layer in SiC for "Compliant Substrate" by Ion Implantation

Lioubtchenko, M. ; Hunn, J. ; Suvkhanov, A. ; Parikh, N. ; Bray, D.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.265-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

Conference Proceedings

4. Doping of GaN by Ion Implantation: Does it Work?

Suvkhanov, A. ; Hunn, J. ; Wu, W. ; Thomson, D. ; Price, K. ; Parikh, N. ; Irene, E. ; Davis, R. F. ; Krasnobaev, L.

Pub. info.:	Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.475-, 1998. Warrendale, Penn.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	512

Conference Proceedings

5. ION IMPLANTATION DAMAGE AND ANNEALING IN GaSb

Iyer, S. ; Parakkat, R. ; Patnaik, B. ; Parikh, N. ; Hegde, S.

Pub. info.:	Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.185-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	316

Conference Proceedings

6. MOLECULAR BEAM EPITAXIAL GROWTH OF GaAs ON SILICON WITH BURIED IMPLANTED OXIDES

Das, K. ; Humphreys, T. P. ; Posthill, J. B. ; Parikh, N. ; tarn, J. ; El-Masry, N. ; Bedair, S. M. ; Chu, W. K. ; Wortman, J. J.

Pub. info.:	Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.513-518, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	107

Conference Proceedings

7. HETEROEPITAXY OF GaAs BY MBE ON HIGH TEMPERATURE HYDROGEN ANNEALED NOMINALLY (100) ORIENTED SILICON

Humphreys, T. P. ; Das, K. ; Posthill, J. B. ; Parikh, N. ; Tarn, J. ; El-Masry, N. ; Bedair, S. M. ; Chu, W. K. ; Wortman, J. J.

Pub. info.:	Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A.. pp.443-448, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	102

Conference Proceedings

8. Damage Mechanisms of Ion Implanted Bulk(0001) ZnO Single Crystals

Adekore, B.T. ; Usov, I. ; Patuaik, B. ; Parikh, N. ; Davis, R.F

Pub. info.:	Radiation effects and ion-beam processing of materials : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.. pp.105-110, 2004. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	792

Conference Proceedings

9. Growth and Doping of AlxGa1-xN Deposited Directly on α(6H)-SiC(0001) Substrates Viia Organometallic Vapor Phase Epitaxy

Bremser, M. D. ; Perry, W. G. ; Edwards, N. V. ; Zheleva, T. ; Parikh, N. ; Aspnes, D. E. ; Davis, R. F.

Pub. info.:	Gallium nitride and related materials : the First International Symposium on Gallium Nitride and Related Materials held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.195-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	395

10.

Conference Proceedings

10. Influence of Annealing Conditions on Dopant Activation of Si+ and Mg+ Implanted GaN

Suvkhanov, A. ; Parikh, N. ; Usov, I. ; Hunn, J. ; Withrow, S. ; Thomson, D. ; Gehrke, T. ; Davis, R. F. ; Krasnobaev, L. Ya.

Pub. info.:	Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.1615-1618, 2000. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	338-342(2)

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