1.

Conference Proceedings

Conference Proceedings
Khanna,V.K. ; Kumar,A. ; Sood,S.C. ; Gupta,R.P. ; Pandya,A. ; Singh,B.B. ; Bhatnagar,P.K.
Pub. info.: Proceedings of the Tenth International Workshop on the Physics of Semiconductor Devices (December 14-18, 1999).  Part1  pp.598-601,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3975
2.

Conference Proceedings

Conference Proceedings
Kumar,U. ; Pandya,A. ; Sinta,R.F. ; Huang,W.-S. ; Bantu,R. ; Katnani,A.D.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.135-145,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049