1.

Conference Proceedings
Conference Proceedings
1. Contamination rates of optical surfaces at 157 nm: impurities outgassed from construction materials and from photoresists
Bloomstein, T.M. ; Sedlacek, J.H.C. ; Palmacci, S.T. ; Hardy, D.E. ; Liberman, V. ; Rothschild, M.
Pub. info.: Optical Microlithography XVI.  Part One  pp.650-661,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
2.

Conference Proceedings
Conference Proceedings
2. Long-term laser durability testing of optical coatings and thin films for 157-nm lithography
Liberman, V. ; Rorhschild, M. ; Palmacci, S.T. ; Efremow, N.N. ; Sedlacek, J.H.C. ; Grenville, A.
Pub. info.: Optical Microlithography XV.  Part One  pp.568-575,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
3.

Conference Proceedings
Conference Proceedings
3. Ambient effects on the laser durability of 157-nm optical coatings
Liberman, V. ; Rothschild, M. ; Palmacci, S.T. ; Efremow, N.N., Jr. ; Sedlacek, J.H.C. ; Grenville, A.
Pub. info.: Optical Microlithography XVI.  Part One  pp.487-498,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
4.

Conference Proceedings
Conference Proceedings
4. Accelerated damage to blank and antireflectance-coated CaF2 surfaces under 157-nm laser irradiation
Liberman, V. ; Rothschild, M. ; Palmacci, S.T. ; Efremow, N.N., Jr. ; Sedlacek, J.H.C. ; Grenville, A.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1631-1638,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
5.

Conference Proceedings
Conference Proceedings
5. Contamination rates of optical surfaces at 157 nm in the presence of hydrocarbon impurities
Bloomstein, T.M. ; Liberman, V. ; Rothschild, M. ; Palmacci, S.T. ; Hardy, D.E. ; Sedlacek, J.H.C.
Pub. info.: Optical Microlithography XV.  Part One  pp.709-723,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
6.

Conference Proceedings
Conference Proceedings
6. Photo-induced changes in 157-nm optical coatings
Liberman, V. ; Bloomstein, T.M. ; Rothschild, M. ; Palmacci, S.T. ; Sedlacek, J.H.C. ; Grenville, A.
Pub. info.: Optical Microlithography XVII.  pp.131-140,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377