1.

Conference Proceedings
Conference Proceedings
1. Defects and Future Silicon Technology
Palm, J. ; Kimerling, L. C.
Pub. info.: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.703-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 378
2.

Conference Proceedings
Conference Proceedings
2. Formation of Subthreshold Defects in Erbium Implanted Silicon
Flink, C. ; Mui, S. ; Gottschalk, H. ; Palm, J. ; Weber, E. R.
Pub. info.: Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.177-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 532
3.

Conference Proceedings
Conference Proceedings
3. Defects in Erbium/Oxygen Implanted Silicon
Duan, X. ; Palm, J. ; Zheng, B. ; Morse, M. ; Michel, J. ; Kimerling, L. C.
Pub. info.: Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.249-,  1997.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 442
4.

Conference Proceedings
Conference Proceedings
4. Properties of Ion Implanted and UHV-CVD Grown Si:Er
Morse, M. ; Zheng, B. ; Palm, J. ; Duan, X. ; Kimerling, L. C.
Pub. info.: Rare earth doped semiconductors II : symposium held April 8-10, 1996, San Francisco, California, U.S.A..  pp.41-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 422
5.

Conference Proceedings
Conference Proceedings
5. Erbium Doped Silicon for Light Emitting Devices
Michel, J. ; Zheng, B. ; Palm, J. ; Ouellette, E. ; Gan, F. ; Kimerling, L. C.
Pub. info.: Rare earth doped semiconductors II : symposium held April 8-10, 1996, San Francisco, California, U.S.A..  pp.317-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 422