1.

Conference Proceedings

Conference Proceedings
M.A. Gribelyuk ; A. Domenicucci ; P. Ronsheim ; J. McMurray ; O. Gluschenkov
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes 7.  pp.233-242,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(3)
2.

Conference Proceedings

Conference Proceedings
S. Guha ; V. Narayanan ; V. Paruchuri ; B. Linder ; M. Copel ; N. Bojarczuk ; Y. Kim ; M. Chudzik ; Y. Wang ; P. Ronsheim
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment.  pp.247-252,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(2)