1.

Conference Proceedings
Conference Proceedings
1. Post-develop inspection for defect control by using the Lasertec 9MD83SRII system
Wang,A. ; Shen,W.P. ; Nakashima,T. ; Ozawa,K.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.677-680,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
2.

Conference Proceedings
Conference Proceedings
2. Puddle developers for ZEP 7000
Ozawa,K. ; Abe,N.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.554-561,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
3.

Conference Proceedings
Conference Proceedings
3. Laser long-path absorption experiment using the Retroreflector in Space (RIS) on the ADEOS satellite
Koga,N. ; Sugimoto,N. ; Ozawa,K. ; Saito,Y. ; Nomura,A. ; Minato,A. ; Aoki,T. ; Itabe,T. ; Kunimori,H.
Pub. info.: Laser radar ranging and atmospheric lidar techniques : 24-26 September 1997, London, UK.  pp.10-18,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3218
4.

Conference Proceedings
Conference Proceedings
4. Optical characteristics of the Retroreflector in Space (RIS) on the ADEOS satellite
Ozawa,K. ; Koga,N. ; Sugimoto,N. ; Aoki,T. ; Itabe,T. ; Kunimori,H. ; Minato,A. ; Kubota,Y. ; Saito,Y. ; Nomura,A.
Pub. info.: Laser radar ranging and atmospheric lidar techniques : 24-26 September 1997, London, UK.  pp.2-9,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3218
5.

Technical Paper
Technical Paper
5. Commercial Parts Used On-Board Monitor Camera for COMETS
Ozawa,K. ; Awasawa,A. ; Nakasima,A. ; Tomita,E. ; Yokota,T. ; Noguchi,K.
Pub. info.: A collection of the 18th AIAA International Communications Satellite Systems Conference and exhibit technical papers : Oakland, Ca, 10-14 April 2000.  v. 1  pp.312-321,  2000.  [Washington, D.C].  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA International Communications Satellite Systems Conference
Ser. no.: 2000
6.

Conference Proceedings
Conference Proceedings
6. Elongation effect of a protecting layer for film life of chemically amplified-type e-beam resist
Ozawa,K. ; Abe,N.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.351-355,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409
7.

Conference Proceedings
Conference Proceedings
7. Spray developer for ZEP 7000
Kawata,A. ; Ozawa,K. ; Abe,N. ; Yamashiro,K. ; Aizawa,T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.252-260,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066