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THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain. pp.1095-1100, 2003. Zuerich-Uetikon, Switzerland. Trans Tech Publications
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Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA. pp.27-36, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
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Emerging Lithographic Technologies VII. 1 pp.257-264, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
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Metrology, Inspection, and Process Control for Microlithography XX. pp.61522O-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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