1.

Conference Proceedings
Conference Proceedings
1. Nanometer-level metrology with a low-voltage CD SEM
Yoshimura,T. ; Ezumi,M. ; Otaka,T. ; Todokoro,H. ; Yamamoto,J. ; Terasawa,T.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.61-70,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Technical Paper
Technical Paper
2. Study on a 100 W-Class Stirling Cycle Cooler-Experimental Results of Operating Characteristics
Otaka,T. ; Araoka,K. ; Kawamoto,A. ; Saito,K. ; Saito,T. ; Kagawa,N.
Pub. info.: Proceedings of the 28th Intersociety Energy Conversion Engineering Conference : IECEC-93, August 8-13, 1993, Atlanta, Georgia.  pp.621-626,  1993.  Society of Automotive Engineering, Inc.
Title of ser.: SAE publication
Ser. no.: P-X
3.

Conference Proceedings
Conference Proceedings
3. Development of critical dimension measurement scanning electron microscope for ULSI(S-8000 series)
Ezumi,M. ; Otaka,T. ; Mori,H. ; Todokoro,H. ; Ose,Y.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.105-113,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725
4.

Conference Proceedings
Conference Proceedings
4. Highly accurate CD measurement with a micro standard
Sasada,K. ; Hashimoto,N. ; Mori,H. ; Otaka,T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.536-544,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050