1.

Conference Proceedings
Conference Proceedings
1. TUNABILITY OF INTRINSIC STRESS IN SiOx DIELECTRIC FILMS FORMED BY MOLECULAR BEAM DEPOSITION
Chand, Naresh ; Kola, R. R. ; Osenbach, J. W. ; Tsang, W. T.
Pub. info.: Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.195-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 356
2.

Conference Proceedings
Conference Proceedings
2. Time Dependent Breakdown in Amorphous Silicon Nitride
Osenbach, J. W. ; Lory, H.J. ; Beck, H.L.
Pub. info.: Proceedings of the Third International Symposium on Corrosion and Reliability of Electronic Materials and Devices.  pp.286-292,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-29