1.

Conference Proceedings

Conference Proceedings
Srivastava, A. ; Osburn, C.M. ; Yee, K.F. ; Heinisch, H.H. ; Vogel, E.M ; Abmed, K.Z. ; Wang, Z. ; Min, K. ; TimberJoke, B. ; Parker, C. ; Worimnan, J.J. ; Hauser, J.R.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.81-88,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
2.

Conference Proceedings

Conference Proceedings
Sun, J. ; Srivastava, A. ; Bartholomew, R.F. ; Bellur, K. ; Osburn, C.M. ; Masnari, N.A.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.587-600,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
3.

Conference Proceedings

Conference Proceedings
Thees, H.-J. ; Osburn, C.M. ; Shiely, J.P. ; Massoud, H.Z.
Pub. info.: The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface.  pp.677-686,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-1
4.

Conference Proceedings

Conference Proceedings
Zhang, K.X. ; Osburn, C.M. ; Hames, G. ; Parker, C. ; Bayoumi, A.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.68-79,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5
5.

Conference Proceedings

Conference Proceedings
Srivastava, A. ; Sun, J. ; Bellur, K. ; Bartholomew, R. ; O'Neil, P. ; Celik, M. ; Osburn, C.M. ; Masnari, N.A. ; OEztuerk, M.C. ; Westhoff, R. ; Fowler, B.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.571-586,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
6.

Conference Proceedings

Conference Proceedings
Kim, I. ; Finn, S.K. ; Osburn, C.M.
Pub. info.: Rapid thermal and other short-time processing technologies III : proceedings of the international symposium.  pp.145-152,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-11
7.

Conference Proceedings

Conference Proceedings
Tsai, J.-Y. ; Osburn, C.M.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.429-440,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
8.

Conference Proceedings

Conference Proceedings
Osburn, C.M.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.197-206,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
9.

Conference Proceedings

Conference Proceedings
Kim, I. ; Han, S.K. ; Kiether, W. ; Lee, S.J. ; Lee, C.H. ; Luan, H.F. ; Luo, Z. ; Rying, E. ; Wicaksana, Z.Wang D. ; Zhu, W. ; Hauser, J. ; Kiingon, A. ; Kwang, D.L. ; Ma, T.P. ; Maria, J.P. ; Misra, V. ; Osburn, C.M.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.211-220,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
10.

Conference Proceedings

Conference Proceedings
Osburn, C.M. ; Tsai, J.Y. ; Wang, Q.F. ; Rose, J. ; Cowen, A.
Pub. info.: Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.576-591,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-6