1.

Conference Proceedings
Conference Proceedings
1. Rapid x-ray reflectivity (XRR) characterization and process monitoring of multilayer Ta/Al2O3/Ta/SiO2/Si
Leng,J. ; Opsal,J.L.
Pub. info.: Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA.  pp.244-252,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4449
2.

Conference Proceedings
Conference Proceedings
2. Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high-k dielectric film HfO2
Leng,J. ; Li,S. ; Opsal,J.L. ; Aspnes,D.E. ; Lee,B.H. ; Lee,J.C.
Pub. info.: Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA.  pp.228-234,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4099
3.

Conference Proceedings
Conference Proceedings
3. Spectrophotometry and beam profile reflectometry measurement of six layers in an SOI film stack
Leng,J.M. ; Sidorowich,J.J. ; Yoon,Y.D. ; Opsal,J.L. ; Lee,B.H. ; Cha,G. ; Moon,J. ; Lee,S.I.
Pub. info.: Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III.  pp.166-172,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2877