1.

Conference Proceedings
Conference Proceedings
1. Convergent-beam parallel detection x-ray diffraction system for characterizing combinatorial epitaxial thin films
Omote,K. ; Kikuchi,T. ; Harada,J. ; Kawasaki,M. ; Ohtomo,A. ; Ohtani,M. ; Ohnishi,T. ; Komiyama,D. ; Koinuma,H.
Pub. info.: Combinatorial and composition spread techniques in materials and device development : 26 January 2000, San Jose, California.  pp.84-91,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3941
2.

Conference Proceedings
Conference Proceedings
2. High-resolution thickness measurements and evaluation of a photomask blank
Hirano,T. ; Matsuo,R. ; Tomiyama,K. ; Yazawa,I. ; Wada,H. ; Otaki,M. ; Omote,K.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.562-572,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873