1.

Conference Proceedings
Conference Proceedings
1. Selective Epitaxial Growth of Silicon by Nitrogen Ion Implantation Technique
Shih, Y.-C. ; Oldham, W.G.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.342-347,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5
2.

Conference Proceedings
Conference Proceedings
2. Optical analysis of mirror-based pattern generation
Shroff, Y.A. ; Chen, Y. ; Oldham, W.G.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.550-559,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
3.

Conference Proceedings
Conference Proceedings
3. Layout decompression chip for maskless lithography
Nikolic, B. ; Wild, B. ; Dai, V. ; Shroff, Y.A. ; Warlick, B. ; Zakhor, A. ; Oldham, W.G.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.1092-1099,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374
4.

Conference Proceedings
Conference Proceedings
4. Image optimization for maskless lithography
Shroff, Y.A. ; Chen, Y. ; Oldham, W.G.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.637-647,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374