1.

Conference Proceedings
Conference Proceedings
1. SOI INTERFACE STRUCTURES IN SELECTIVE EPITAXIAL GROWTH
Weng, Zara S. ; Gronsky, R. ; Lou, J. C. ; Oldham, W. G.
Pub. info.: Structure and properties of interfaces in materials : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A..  pp.707-712,  1992.  Pittsburgh.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 238
2.

Conference Proceedings
Conference Proceedings
2. A 3D substrate and buried defect simulator for EUV mask blanks
Chen, Y. ; Chu, C. H. ; Shroff, Y. ; Wang, J.-S. ; Oldham, W. G.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.455-465,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751
3.

Conference Proceedings
Conference Proceedings
3. THE STUDY OF SEAM LINE DEFECTS IN SILICON-ON-OXIDE BY MERGED EPITAXIAL LATERAL OVERGROWTH
Shih, Yangchin ; Lou, J. C. ; Oldham, W. G.
Pub. info.: Mechanisms of thin film evolution.  pp.257-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 317