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17 results

Conference Proceedings

1. New registration technique using voltage-contrast images for low-energy electron-beam lithography

Nakasugi,T. ; Ando,A. ; Sugihara,K. ; Miyoshi,M. ; Okumura,K.

Pub. info.:	Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.334-341, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4343

Conference Proceedings

2. Hyperspectral imaging of pathology samples

Tsurui,H. ; Lerner,J.M. ; Takahashi,K. ; Hirose,S. ; Mitsui,K. ; Okumura,K. ; Shirai,T.

Pub. info.:	Proceedings of three-dimensional and multidimensional microscopy : image acquisition and processing VI : 24-25 January 1999, San Jose, California. pp.273-281, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3605

Conference Proceedings

3. Heterojunction field effect transistors (HJFETs) for a readout circuit of a cryogenically cooled far-infrared detector

Hosako,I. ; Okumura,K. ; Yamashita-Yui,Y. ; Akiba,M. ; Hiromoto,N.

Pub. info.:	Infrared astronomical instrumentation : 23-25 March 1998, Kona, Hawaii. Part 1 pp.281-288, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3354

Conference Proceedings

4. Surface treatment effects on Si(111) and (100) surface structures and Si/SiO2 interface state

Yamamoto,H. ; Okumura,K. ; Kanashima,T. ; Okuyama,M.

Pub. info.:	Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China. pp.161-165, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3175

Conference Proceedings

5. Experimental test of the de Broglie wave packet nature of the neutron

Utsuro,M. ; Ignatovich,V.K. ; Geltenbort,P.W. ; Brenner,Th. ; Butterworth,J. ; Hino,M. ; Okumura,K. ; Sugimoto,M.

Pub. info.:	EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado. pp.372-379, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3767

Conference Proceedings

6. Development of a supermirror Doppler shifter for quasi-continuous ultracold neutron generation at pulsed neutron sources

Utsuro,M. ; Soyama,K. ; Tajima,N. ; Okumura,K.

Pub. info.:	EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado. pp.344-352, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3767

Conference Proceedings

7. Impact of built-in film thickness measurement in CMP process

Yano,H. ; Okumura,K. ; Kondo,N. ; Horie,M.

Pub. info.:	In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland. pp.68-75, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3743

Conference Proceedings

8. Flight performance of the Far-Infrared Line Mapper(FILM)

Shibai,H. ; Nakagawa,T. ; Makiuti,S. ; Matsuhara,H. ; Hiromoto,N. ; Okumura,K. ; Doi,Y. ; Toya,T. ; Okuda,H.

Pub. info.:	Infrared spaceborne remote sensing IV : 6-7 August 1996, Denver, Colorado. pp.267-275, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2817

Conference Proceedings

9. Evaluation of cryogenic readout circuits with GaAs JFETs for far-infrared detectors

Okumura,K. ; Hosako,I. ; Akiba,M. ; Hiromoto,N.

Pub. info.:	Optical and IR telescope instrumentation and detectors : 27-31 March 2000, Munich, Germany. Part1 pp.452-458, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4008

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Conference Proceedings

10. New pattern generation system based on i-line stepper:photomask repeater

Kyoh,S. ; lnoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K. ; Irie,N. ; Muramatsu,K. ; Magome,N.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part1 pp.647-657, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000

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Author: Okumura,K.