1.

Conference Proceedings
Conference Proceedings
1. A New Approach Of Thin-Film X-Ray Diffraction / Scattering Analysis For Ultra-Low-K Dielectrics With Periodic Pore Structures
Hata, N. ; Oku, Y. ; Yamada, K. ; Kikkawa, T.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.581-586,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
2.

Conference Proceedings
Conference Proceedings
2. Characteristics of Self-Assembled Ultra-Low-k Porous Silica Films
Oku, Y. ; Fujii, N. ; Kohmura, K. ; Yamada, K. ; Hata, N. ; Seine, Y. ; Ichikawa, R. ; Nishiyama, N. ; Tanaka, S. ; Miyoshi, H. ; Oike, S. ; Tanaka, H. ; Takada, S. ; Negoro, C. ; Nakano, A. ; Rang, H. -K. ; Suh, K. -P.
Pub. info.: Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium.  pp.331-345,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-04
3.

Conference Proceedings
Conference Proceedings
3. Advanced Characterization of Ultra-Low-k Periodic Porous Silica Films: Pore Size Distribution, Pore-Diameter Anisotropy, and Size and Macroscopic Isotropy of Domain Structure
Hata, N. ; Negoro, C. ; Takada, S. ; Yamada, K. ; Oku, Y. ; Kikkawa, T.
Pub. info.: Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A..  pp.191-196,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 766
4.

Conference Proceedings
Conference Proceedings
4. Self-assembled ultralow-k porous silica films for 45-nm node technology (Invited Paper)
Kikkawa, T. ; Oku, Y. ; Kohmura, K. ; Fujii, N. ; Tanaka, H. ; Ishikawa, A. ; Matsuo, H. ; Sonoda, Y. ; Miyoshi, H. ; Goto, T. ; Hata, N. ; Seino, Y. ; Takada, S. ; Yoshino, T. ; Kinoshita, K.
Pub. info.: Nanofabrication: Technologies, Devices, and Applications.  pp.153-157,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5592