Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.377-382, 1992. Pittsburgh, Pa.. Materials Research Society
Okoshi, M. ; Kuramatsu, M. ; Takao, H. ; Inoue, N.
Pub. info.:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.250-254, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Okoshi, M. ; Kosuge Y. ; Inoue, N. ; Yamashita, T.
Pub. info.:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.265-269, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.33-38, 1990. Pittsburgh, Pa.. Materials Research Society
Okoshi, M. ; Kashiura, H. ; Miyokawa, T. ; Toyoda, K. ; Murahara, M.
Pub. info.:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.737-742, 1993. Pittsburgh, Pa.. Materials Research Society
Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.. pp.451-458, 1991. Pittsburgh, Pa.. Materials Research Society
Miyokawa, T. ; Okoshi, M. ; Toyoda, K. ; Murahara, M.
Pub. info.:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.87-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.238-242, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Advanced laser processing of materials - fundamentals and applications : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.655-, 1996. Pittsburgh, PA. MRS - Materials Research Society
Okoshi, M. ; Miyokawa, T. ; Kashiura, H. ; Murahara, M.
Pub. info.:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.365-, 1994. Pittsburgh, PA. MRS - Materials Research Society