Kusunoki, K. ; Kamei, K. ; Okada, N. ; Yashiro, N. ; Yauchi, A. ; Ujihara, T. ; Nakajima, K.
Pub. info.:
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.119-122, 2006. Stafa-Zuerich. Trans Tech Publications
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.138-141, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering