1.

Conference Proceedings
Conference Proceedings
1. Adaptive x-ray optics with a deformable mirror [5900-44]
Kitamoto, S. ; Yamamoto, N. ; Kohmura, T. ; Suga, K. ; Sekiguchi, H. ; Sato, J. ; Sudo, K. ; Watanabe, T. ; Ohkubo, Y. ; Sekiguchi, A. ; Tsujimoto, M.
Pub. info.: Optics for EUV, x-ray, and gamma-ray astronomy II : 3-4 August 2005, San Diego, California, USA.  pp.590019-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5900
2.

Conference Proceedings
Conference Proceedings
2. Synthesis of 3-Alkoxy-1-propanol from Allyl Alcohol by Use of Metal Oxide Catalysts in the Liquid-Phase
Yamakawa, T. ; Ohkubo, Y. ; Takahashi, I. ; Koyama, H.
Pub. info.: Science and technology in catalysis 2002 : proceedings of the Fourth Tokyo Conference on Advanced Catalytic Science and Technology, Tokyo, July 14-19, 2002.  pp.549-550,  2003.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 145
3.

Technical Paper
Technical Paper
3. Development of Dry Low-NOx Combustor for 300 KW Class Gas Turbine Applied to Co-Generation Systems.
Ohkubo, Y. ; Azegami, O. ; Sato, H. ; Idota, Y. ; Higuchi, S.
Pub. info.: A.S.M.E. paper.  2001.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : GT
Ser. no.: 2001
4.

Technical Paper
Technical Paper
4. Study on the Effects of EGR Cooler Performance on Combustion Properties of the Pre-mixed Compression Ignition Combustion by Multi Cylinder DI Diesel Engine.
Ishikawa, N. ; Ohkubo, Y. ; Kudou, K.
Pub. info.: 2007 International Fuels and Lubricants Meeting : SAE technical paper.  2007.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2007
5.

Conference Proceedings
Conference Proceedings
5. Multi-layer resist system for 45-nm-node and beyond: Part II [6349-121]
Fujimura, Y. ; Morimoto, J. ; Manoshiro, A. ; Shimizu, M. ; Takamizawa, H. ; Hashimoto, M. ; Shiratori, H. ; Horii, K. ; Yokoya, Y. ; Ohkubo, Y. ; Enomoto, T. ; Sakaguchi, T. ; Nagai, M.
Pub. info.: Photomask Technology 2006.  pp.634936-634936,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
6.

Conference Proceedings
Conference Proceedings
6. Multi-layer resist system for 45-nm-node and beyond: Part III [6349-120]
Abe, Y. ; Morimoto, J. ; Yokoyama, T. ; Kominato, A. ; Ohkubo, Y.
Pub. info.: Photomask Technology 2006.  pp.634935-634935,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
7.

Conference Proceedings
Conference Proceedings
7. Development of attenuating PSM shifter for F2 and high-transmission ArF lithography
Nozawa, O. ; Shiota, Y. ; Mitsui, H. ; Suzuki, T. ; Ohkubo, Y. ; Ushida, M. ; Yusa, S. ; Nishimura, T. ; Noguchi, K. ; Sasaki, S. ; Mohri, H. ; Hayashi, N.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.39-50,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
8.

Conference Proceedings
Conference Proceedings
8. Advanced NLD mask dry etching system for 90-nm node technology
Harashima, N. ; Sasaki, T. ; Kuwahara, K. ; Hayashi, T. ; Tanaka, Y. ; Yoshioka, N. ; Hara, M. ; Ohkubo, Y.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.275-280,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
9.

Conference Proceedings
Conference Proceedings
9. Improvement of NLD mask dry etching system for 100-nm-node technology
Tanaka, Y. ; Yoshioka, N. ; Harashima, N. ; Sasaki, T. ; Kuwahara, K. ; Hayashi, T. ; Hara, M. ; Ohkubo, Y.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.619-625,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
10.

Conference Proceedings
Conference Proceedings
10. Multi-layer resist system for 45-nm-node and beyond: part I [6349-18]
Hashimoto, M. ; Shiratori, H. ; Horii, K. ; Yokoya, Y. ; Ohkubo, Y. ; Takamizawa, H. ; Fujimura, Y. ; Morimoto, J. ; Manoshiro, A. ; Shimizu, M. ; Yokoyama, T. ; Enomoto, T. ; Nagai, M.
Pub. info.: Photomask Technology 2006.  pp.63490I-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349