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14 results

Conference Proceedings

1. *GROWTH OF AMORPHOUS AND CRYSTALLINE SILICON BY HR-CVD (HYDROGEN RADICAL ENHANCED CVD)

Shibata, N. ; Fukuda, K. ; Ohtoshi, H. ; Hanna, J. ; Oda, S. ; Shimizu, I.

Pub. info.:	Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A.. pp.225-236, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	95

Conference Proceedings

2. REACTIVE DEPOSITION OF a-SILICON AND Si-BASED ALLOYS

Hanna, J. ; Oda, S. ; Shirai, H. ; Miyauchi, A. ; Tanabe, A. ; Fukuda, K. ; Ohtoshi, T. ; Tokuhiro, O. ; Nguyen, H. ; Shimizu, I.

Pub. info.:	Materials issues in amorphous-semiconductor technology : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.11-24, 1986. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	70

Conference Proceedings

3. Preparation of nanocrystalline silicon quantum dots by pulsed plasma processes with high deposition rates

Nishiguchi, K. ; Hara, S. ; Amano, T. ; Hatatani, S. ; Oda, S.

Pub. info.:	Semiconductor quantum dots : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.43-, 2000. Warrendale, PA. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	571

Conference Proceedings

4. Fabrication of Nanocrystalline Si by SiH4 Plasma Cell

Otobe, M. ; Kanai, T. ; Oda, S.

Pub. info.:	Amorphous silicon technology, 1995 : Symposium held April 18-21, 1995, San Francisco, California, U.S.A.. pp.51-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	377

Conference Proceedings

5. Electron transport properties and device applications of nanocrystalline silicon quantum dots

H. Mizuta(Invited Speaker) ; Khalafalla, M. ; Durrani, Z.A.K. ; Una, S. ; Koshida, N. ; Tsuchiya, Y. ; Oda, S.

Pub. info.:	Nanoscale devices, materials, and biological systems : fundamentals and applications : proceedings of the international symposium. pp.89-106, 2005. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-13

Conference Proceedings

6. Solvent Recovery by PSA with High Silica Zeolite: An Experimental and a Simulation Study

Chihara, K. ; Aikou, T. ; Kaneko, T. ; Oda, S. ; Hamashima, S.

Pub. info.:	Recent advances in the science and technology of zeolites and related materials : proceedings of the 14th International Zeolite Conference, Cape Town, South Africa, 25-30th April 2004. pp.2003-2011, 2004. Amsterdam. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	154

Conference Proceedings

7. PREPARATION OF a-Si:H FILMS BY VHF PLASMA CVD

Oda, S. ; Noda, J.’I. ; Matsumura, M.

Pub. info.:	Amorphous silicon technology : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.117-122, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	118

Conference Proceedings

8. IMPROVED OFF-CHARACTERISTICS OF a-Si VERTICAL-TYPE MOSFETs

Okada, H. ; Sakano, J. ; Oda, S. ; Matsumura, M.

Pub. info.:	Amorphous silicon technology : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.219-224, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	118

Conference Proceedings

9. Fabrication and Characterization of Cold Electron Emitter Based on Nanocrystalline Silicon Dots

Nishiguchi, K. ; Zhao, X. ; Oda, S.

Pub. info.:	Microcrystalline and nanocrystalline semiconductors-2000 : symposium held November 27-30, 2000, Boston, Massachusetts, U.S.A.. 2001. Warrendale, PA.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	638

10.

Conference Proceedings

10. Retardation in the Oxidation Rate of Nanocrystalline Silicon Quantum Dots

Omachi, J. ; Nakamura, R. ; Nishiguchi, K. ; Oda, S.

Pub. info.:	Microcrystalline and nanocrystalline semiconductors-2000 : symposium held November 27-30, 2000, Boston, Massachusetts, U.S.A.. 2001. Warrendale, PA.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	638

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Author: Oda, S.