1.

Conference Proceedings
Conference Proceedings
1. Resist characteristics with direct-write electron beam and SCALPEL exposure system
Sato,M. ; Omori,K. ; Ishikawa,K. ; Nakayama,T. ; Novembre,A.E. ; Ocola,L.E.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.227-236,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
2.

Conference Proceedings
Conference Proceedings
2. Alignment mark detection in CMOS materials with SCALPEL e-beam lithography
Farrow,R.C. ; Waskiewicz,W.K. ; Kizilyalli,I.C. ; Callatin,G.M. ; Liddle,J.A. ; Mkrtchyan,M.M. ; Kornblit,A. ; Ocola,L.E. ; Klemens,F.P. ; Felker,J.A. ; Biddick,C.J. ; Kraus,J.S. ; Blakey,M.I. ; Orphanos,P. ; Merchant,S.M.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.217-226,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
3.

Conference Proceedings
Conference Proceedings
3. Development of a technique for rapid at-wavelength inspection of EUV mask blanks
Spector,S.J. ; Luo,P. ; Novembre,A.E. ; Ocola,L.E. ; White,D.L. ; Tennant,D.M. ; O.R.Wood ?
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.606-614,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
4.

Conference Proceedings
Conference Proceedings
4. Optimization of DUV chemically amplified resist platforms for SCALPEL e-beam exposure
Ocola,L.E. ; Blakey,M.I. ; Orphanos,P.A. ; Li,W.-Y. ; Novembre,A.E. ; Brainard,R.L. ; Mackevich,J.F. ; Taylor,G.N.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.194-203,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997