1.

Conference Proceedings
Conference Proceedings
1. Properties of ZrO₂ Thin Films Deposited by Plasma Assisted Pulsed Reactive Magnetron Sputtering
M. Vergöhl ; O. Werner ; S. Bruns
Pub. info.: 51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL.  pp.492-497,  2008.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 51
2.

Conference Proceedings
Conference Proceedings
2. Superimposed MF-HiPIMS Processes for the Deposition of ZrO₂ Thin Films
M. Vergöhl ; O. Werner ; S. Bruns ; T. Wallendorf ; G. Mark
Pub. info.: 51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL.  pp.307-312,  2008.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 51
3.

Conference Proceedings
Conference Proceedings
3. HIPIMS/HPPMS Process Design with Multi Channel Pulse Pattern Controller
T. Wallendorf ; M. Vergoehl ; O. Werner ; R. Bandorf
Pub. info.: 51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL.  pp.161-165,  2008.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 51
4.

Conference Proceedings
Conference Proceedings
4. Preparation of Photocatalytically Active TiO₂ Layers on Polycarbonate by Reactive Magnetron Sputtering
T. Neubert ; O. Werner ; F. Neumann ; M. Vergöhl
Pub. info.: 51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL.  pp.143-147,  2008.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 51
5.

Conference Proceedings
Conference Proceedings
5. New developments in magnetron sputter processes for precision optics
M. Vergöhl ; O. Werner ; S. Bruns
Pub. info.: Advances in optical thin films III : 2-3 September 2008, Glasgow, United Kingdom.  pp.71010B-1-71010B-17,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7101