1.

Conference Proceedings
Conference Proceedings
1. PLASMA POLYMERIZATION OF FLUOROCARBON THIN FILMS ON GLASS AND METAL SUBSTRATES
O'Keefe, M. J. ; Rigsbee, J. M.
Pub. info.: Polymer/inorganic interfaces : symposium held April 14-16, 1993, San Francisco, California, U.S.A..  pp.179-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 304
2.

Conference Proceedings
Conference Proceedings
2. Film stress influence of bilayer metallization on the structure of RF MEMS switches
Strawser, R. E. ; Cortez, R. ; O'Keefe, M. J. ; Leedy, K. D. ; Ebel, J. L. ; Henderson, H. T.
Pub. info.: Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A..  pp.213-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 594
3.

Conference Proceedings
Conference Proceedings
3. Stress, microstructure and temperature stability of reactive sputter deposited Ta(N) thin films
Leedy, K. D. ; O'Keefe, M. J. ; Grant, J. T.
Pub. info.: Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A..  pp.427-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 594
4.

Conference Proceedings
Conference Proceedings
4. Rapid Thermal Transformation of A-15 Crystal Structure Metallic Thin Films
O'Keefe, M. J. ; Cerny, C. L.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.377-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387
5.

Conference Proceedings
Conference Proceedings
5. Stress and Stability of Sputter-Deposited A-15 and bcc Crystal Structure Tungsten Thin Films
O'Keefe, M. J. ; Stutz, C. E.
Pub. info.: Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A..  pp.233-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 472
6.

Conference Proceedings
Conference Proceedings
6. SPUTTER DEPOSITION AND THERMALLY INDUCED PHASE TRANSFORMATION OF NON-BCC CHROMIUM THIN FILMS
O'Keefe, M. J. ; Horiuchi, S. ; Chu, J. P. ; Rigsbee, J. M.
Pub. info.: Phase transformations in thin films : thermodynamics and kinetics : symposium held April 13-15, 1993, San Francisco, California, U.S.A..  pp.361-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 311