1.

Conference Proceedings

Conference Proceedings
Novoselov,A.R. ; Klimenko,A.G. ; Fedosenko,E.V. ; Plotnikov,A.E.
Pub. info.: Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA.  pp.432-437,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3933
2.

Conference Proceedings

Conference Proceedings
Novoselov,A.R. ; Klimenko,A.G. ; Esaev,D.C. ; Vasilyev,V.V.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.537-546,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3895
3.

Conference Proceedings

Conference Proceedings
Novoselov,A.R. ; Klimenko,A.G.
Pub. info.: Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore.  pp.150-153,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4426
4.

Conference Proceedings

Conference Proceedings
Novoselov,A.R. ; Klimenko,A.G.
Pub. info.: In-Line Methods and Monitors for Process and Yield Improvement.  pp.269-276,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3884