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22 results

Conference Proceedings

1. Positive-tone processing of plasma-polymerized methylsilane (PPMS)

Dabbagh,G. ; Hutton,R.S. ; Cirelli,R.A. ; Reichmanis,E. ; Novembre,A.E. ; Nalamasu,O.

Pub. info.:	Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California. Part 1 pp.394-400, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3333

Conference Proceedings

2. Critical issues for developing a high-throughput SCALPEL system for sub-0.18-ｦﾌm lithography generations

Stanton,S.T. ; Liddle,J.A. ; Waskiewicz,W.K. ; Mkrtchyan,M.M. ; Novembre,A.E. ; Harriott,L.R.

Pub. info.:	Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.673-688, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3331

Conference Proceedings

3. SCALPEL mask blank fabrication

Saunders,T.E. ; Blakey,M.I. ; Caminos,C. ; Bogart,G.R. ; Farrow,R.C. ; Knurek,C.S. ; Kornblit,A. ; Liddle,J.A. ; Novembre,A.E. ; Peabody,M.L.

Pub. info.:	Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.248-255, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3874

Conference Proceedings

4. Cleaning of SCALPEL next-generation Lithography masks using PLASMAX,a revolutionary dry cleaning technology

Festa,J.J. ; Novembre,A.E. ; Bennett,D.A. ; Kasica,R.J. ; Bailey,B. ; Blakey,M.I.

Pub. info.:	19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California. Part2 pp.916-926, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3873

Conference Proceedings

5. Techniques to inspect SCALPEL masks

Taylor,D. ; Howard,W.B. ; Kasica,R.J. ; Farrow,R.C. ; Novembre,A.E. ; Caminos,C. ; Knurek,C.S.

Pub. info.:	19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California. Part2 pp.858-864, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3873

Conference Proceedings

6. Resist characteristics with direct-write electron beam and SCALPEL exposure system

Sato,M. ; Omori,K. ; Ishikawa,K. ; Nakayama,T. ; Novembre,A.E. ; Ocola,L.E.

Pub. info.:	Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part1 pp.227-236, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3676

Conference Proceedings

7. Defect inspection and linewidth measurement of SCALPEL thin membrane masks using optical transmission

Farrow,R.C. ; Blakey,M.I. ; Kasica,R.J. ; Liddle,J.A. ; Mkrtchyan,M.M. ; Novembre,A.E. ; Peabody,M.L. ; Saunders,T.E. ; Windt,D.L. ; Zurbrick,L.S. ; Wiley,J.N. ; Aquino,C. ; Hentschel,S.L. ; Davis,L.C. ; Boyer,B.

Pub. info.:	Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California. pp.221-231, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3332

Conference Proceedings

8. 200-mm SCALPEL mask development

Bogart,G.R. ; Novembre,A.E. ; Kornblit,A. ; Peabody,M.L. ; Farrow,R.C. ; Blakey,M.I. ; Kasica,R.J. ; Liddle,J.A. ; Saunders,T.E. ; Knurek,C.S. ; Johnston,I.

Pub. info.:	Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part1 pp.171-177, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3676

Conference Proceedings

9. Finite element modeling of SCALPEL masks

Engelstad,R.L. ; Lovell,E.G. ; Dicks,G.A. ; Martin,C.J. ; Schlax,M.P. ; Semke,W.H. ; Liddle,J.A. ; Novembre,A.E.

Pub. info.:	Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part1 pp.128-139, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3676

10.

Conference Proceedings

10. Production of SCALPEL masks in a commercial mask facility

Newport,C.L. ; Parker,J. ; Smith,K.M. ; Benveniste,A. ; Kim,N.-W. ; Reyland,D. ; Farrow,R.C. ; Novembre,A.E. ; Kasica,R.J. ; Knurek,C.S. ; Peabody,M.L. ; Rutberg,L.

Pub. info.:	Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part1 pp.162-170, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3676

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