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10 results

Conference Proceedings

1. Calibration of high-speed optical profiler

Schmit, J. ; Krell, M. ; Novak, E.

Pub. info.:	Optical manufacturing and testing V : 3-5 August 2003, San Diego, California, USA. pp.355-364, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5180

Conference Proceedings

2. Dynamic MEMS measuring interferometric microscope

Novak, E. ; Schurig, M.

Pub. info.:	Optical manufacturing and testing V : 3-5 August 2003, San Diego, California, USA. pp.228-235, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5180

Conference Proceedings

3. Ritchey-Common test used for measurement of astronomical optic

Han, S. ; Novak, E. ; Schurig, M.

Pub. info.:	Specialized optical developments in astronomy :25-26 August 2002, Waikoloa, Hawaii, USA. pp.270-273, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4842

Technical Paper

4. An Investigation into Cutting Edge Geometry of Uncoated and Coated Tools by Optical Profilometry.

Ogilvie, A. ; Novak, E.

Pub. info.:	S.M.E. technical paper. 2010. Dearborn, Mich.. Society of Manufacturing Engineers
Title of ser.:	SME Technical Paper : TP
Ser. no.:	2010

Conference Proceedings

5. Improved shape measurement in optical profiler

Schmit, J. ; Novak, E.

Pub. info.:	Recent Developments in Traceable Dimensional Measurements II. pp.193-202, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5190

Conference Proceedings

6. Application of grazing incidence interferometer to rough surface measurement

Han, S. ; Novak, E. ; Sullivan, J.

Pub. info.:	Optical Measurement Systems for Industrial Inspection III. pp.391-400, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5144

Conference Proceedings

7. Template-based software for accurate MEMS characterization

Novak, E. ; Krell, M.B. ; Browne, T.

Pub. info.:	Reliability, Testing, and Characterization of MEMS/MOEMS II. pp.75-80, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4980

Conference Proceedings

8. Three-dimensional dynamic environmental MEMS characterization (Invited Paper)

Novak, E.

Pub. info.:	Optical Micro- and Nanometrology in Manufacturing Technology. pp.1-8, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5458

Conference Proceedings

9. MEMS metrology techniques (Invited Paper)

Novak, E.

Pub. info.:	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV. pp.173-181, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5716

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Conference Proceedings

10. Surface profiler for fixed through-glass measurement

Han, S. ; Novak, E. ; Wissinger, J. ; Guenther, B.W. ; Browne, T. ; Yanine, E. ; Schurig, M. ; Herron, J.D. ; McCloy, C. ; Li, X. ; Krell, M.B. ; Harris, J.

Pub. info.:	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV. pp.189-197, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5716

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Author: Novak, E.