1.

Conference Proceedings
Conference Proceedings
1. Molecular beam mass spectrometry studies of the thermal decomposition of tetrakis(dimethylamino)titanium
Amato-Wierda, Carmela C. ; Norton, Edward T. Jr. ; Wierda, Derk A.
Pub. info.: Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.103-,  2000.  Warrendale.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 606
2.

Conference Proceedings
Conference Proceedings
2. Low temperature chemical vapor deposition of titanium nitride thin films with hydrazine and tetrakis-(dimethylamide)titanium
Amato-Wierda, Carmela ; Norton, Edward T. Jr. ; Wierda, Derk A.
Pub. info.: Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.91-,  2000.  Warrendale.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 606
3.

Conference Proceedings
Conference Proceedings
3. Aspects of gas phase chemistry during chemical vapor deposition of Ti-Si-N thin films with Ti(NMe2)4(TDMAT), NH3, and SiH4
Amato-Wierda, Carmela ; Norton, Edward T. Jr. ; Wierda, Derk A.
Pub. info.: Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.97-,  2000.  Warrendale.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 606